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29 April 2008 Investigation of fluorescence on wavelength 13.5 nm of x-ray tube for nanolithographer
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Proceedings Volume 7025, Micro- and Nanoelectronics 2007; 702504 (2008)
Event: Micro- and Nanoelectronics 2007, 2007, Zvenigorod, Russian Federation
In the article a program for simulation of intensity of fluorescence of X-ray tubes (XRT) target materials excited by electrons with the energy less than 15 keV is described. The basis of the program is a modeling of interaction of fast electrons with a matter by the Monte-Carlo method. The paper has a comparison data of theoretical and experimental intensities of XRT radiation at Si Lα characteristic line and bremsstrahlung radiation of W target. Basing on the calculation a new XRT was developed.
© (2008) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
N. Chkhalo, I. Zabrodin, I. Kas'kov, E. Kluenkov, A. Pestov, and N. Salashchenko "Investigation of fluorescence on wavelength 13.5 nm of x-ray tube for nanolithographer", Proc. SPIE 7025, Micro- and Nanoelectronics 2007, 702504 (29 April 2008);

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