Langmuir probe applications in monitoring of plasma etching

Andrey V. Miakonkikh; Konstantin V. Rudenko; Alexander A. Orlikovsky

doi:10.1117/12.802362

29 April 2008 Langmuir probe applications in monitoring of plasma etching

Andrey V. Miakonkikh, Konstantin V. Rudenko, Alexander A. Orlikovsky

Proceedings Volume 7025, Micro- and Nanoelectronics 2007; 70250F (2008) https://doi.org/10.1117/12.802362
Event: Micro- and Nanoelectronics 2007, 2007, Zvenigorod, Russian Federation

Abstract

The purpose of the paper is to investigate the measurable variations in chemistry of SF₆/O₂/Ar plasma due to etching through layers interface of structure poly-Si/SiO₂/Si. The noticeable magnitude and sufficient stability in some single parameters deference make it possible to develop application of Langmuir probe as implementation of a simple end-point-detection technique. The proposed method is based on the established idea that the surface reactions involved to the process of etching lead to dramatic changes in some parameters of the charged plasma species during the process. Particularly it was found that the densities of electrons and ions and the electron temperature are affected. It was shown that effective electron temperature and electron energy distribution function of the reactive gaseous mixture differ greatly from those of Ar plasma under the same excitation conditions. An approach to wafer-surface charging minimization by varying excitation settings and EEDF was proposed.

Citation Download Citation

Andrey V. Miakonkikh, Konstantin V. Rudenko, and Alexander A. Orlikovsky "Langmuir probe applications in monitoring of plasma etching", Proc. SPIE 7025, Micro- and Nanoelectronics 2007, 70250F (29 April 2008); https://doi.org/10.1117/12.802362

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available