An IntenCD map of a reticle as a feed-forward input to DoseMapper

Michael Ben Yishai; Jo Finders; Robert Kazinczi; Arno Bleeker; Paul Luehrmann; Ingrid Janssen; Frank Duray; Lior Shoval; Christophe Couderc; Rich Piech; Noam Hillel; Ilan Englard

doi:10.1117/12.793124

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19 May 2008 An IntenCD map of a reticle as a feed-forward input to DoseMapper

Michael Ben Yishai, Jo Finders, Robert Kazinczi, Arno Bleeker, Paul Luehrmann, Ingrid Janssen, Frank Duray, Lior Shoval, Christophe Couderc, Rich Piech, Noam Hillel, Ilan Englard

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Proceedings Volume 7028, Photomask and Next-Generation Lithography Mask Technology XV; 70283H (2008) https://doi.org/10.1117/12.793124
Event: Photomask and NGL Mask Technology XV, 2008, Yokohama, Japan

Abstract

The tight process window of advanced lithography in the semiconductor industry is further challenged by the growing contribution of photo-mask related CD variations. In previous technology generations, global measurement and global correction were sufficient to compensate for critical dimension uniformity (CDU) variations deriving from various sources. However, in the low K₁ regime for 45nm nodes and below, cross-coupled effects such as Mask Error Enhancement Factor (MEEF) and mask CDU can easily consume the overall CD budget related to lithographic process steps (see table 3). ASML's DoseMapper was designed to correct system (e.g. scanner, track) and non-system (e.g. mask) related errors controlled by an Automated Process Control (APC) system. It was introduced as a method for correcting intra-field and inter-field variations, relying on feedback from printed wafer based metrology. Here we propose using AMAT's IntenCD^TM map for supplying dense CDU measurement results from the reticle as a feed-forward input to DoseMapper. The IntenCD^TM application characterizes CD uniformity of 'features of interest' across the mask in the form of a dense map with high accuracy and throughput. The case studies presented in this paper are the result of collaboration between AMAT and ASML to demonstrate the benefit of feeding IntenCD output into DoseMapper CD analyzer which translates the mask CD map into a scanner dose recipe. The integrated solution can be implemented in manufacturing factories to shorten turnaround time and improve the exposure process window. It can be used to compensate for CDU effects due to mask production as well as contributions due to life time deterioration.

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Michael Ben Yishai, Jo Finders, Robert Kazinczi, Arno Bleeker, Paul Luehrmann, Ingrid Janssen, Frank Duray, Lior Shoval, Christophe Couderc, Rich Piech, Noam Hillel, and Ilan Englard "An IntenCD map of a reticle as a feed-forward input to DoseMapper", Proc. SPIE 7028, Photomask and Next-Generation Lithography Mask Technology XV, 70283H (19 May 2008); https://doi.org/10.1117/12.793124

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