Shadowing growth of biaxially textured nanostructured films

Toh-Ming Lu; Fu Tang; Gwo-Ching Wang

doi:10.1117/12.794217

10 September 2008 Shadowing growth of biaxially textured nanostructured films

Toh-Ming Lu, Fu Tang, Gwo-Ching Wang

Proceedings Volume 7041, Nanostructured Thin Films; 704107 (2008) https://doi.org/10.1117/12.794217
Event: NanoScience + Engineering, 2008, San Diego, California, United States

Abstract

Microstructure of a nanostructured film is not only of fundamental scientific interest but also an important subject from the practical point of view. In this paper we will discuss the formation of biaxially textured film under extreme shadowing during growth. Biaxially textured films are not single crystals, but they possess both the out-of-plane and in-plane preferred orientations. We will also discuss our newly developed reflection high-energy electron diffraction (RHEED) surface pole figure technique and how we employ this technique to capture the evolution of growth front texture.

Citation Download Citation

Toh-Ming Lu, Fu Tang, and Gwo-Ching Wang "Shadowing growth of biaxially textured nanostructured films", Proc. SPIE 7041, Nanostructured Thin Films, 704107 (10 September 2008); https://doi.org/10.1117/12.794217

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