Test objects with right-angled and trapezoidal profiles of the relief elements

Yu. A. Novikov; V. P. Gavrilenko; A. V. Rakov; P. A. Todua

doi:10.1117/12.794834

9 September 2008 Test objects with right-angled and trapezoidal profiles of the relief elements

Yu. A. Novikov, V. P. Gavrilenko, A. V. Rakov, P. A. Todua

Proceedings Volume 7042, Instrumentation, Metrology, and Standards for Nanomanufacturing II; 704208 (2008) https://doi.org/10.1117/12.794834
Event: NanoScience + Engineering, 2008, San Diego, California, United States

Abstract

Comparison is made for parameters and properties of test objects based on the relief structures with right-angled and trapezoidal profiles, which are used for calibration of scanning electron microscopes (SEMs) and atomic force microscopes (AFMs). Methods of calibration of SEMs and AFMs with help of this test objects are presented. Comparative analysis has shown that trapezoidal structures with large angles of sidewall inclination, created by anisotropic etching of silicon with the (100) orientation of its surface, possess the most universal characteristics. Such structures could be used for development of internationally recognized measures of length in the nanometer range for calibration of SEMs and AFMs.

Citation Download Citation

Yu. A. Novikov, V. P. Gavrilenko, A. V. Rakov, and P. A. Todua "Test objects with right-angled and trapezoidal profiles of the relief elements", Proc. SPIE 7042, Instrumentation, Metrology, and Standards for Nanomanufacturing II, 704208 (9 September 2008); https://doi.org/10.1117/12.794834

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