Optical heterodyne laser encoder for in-plane nanopositioning

Chyan-Chyi Wu; Cheng-Chih Hsu; Ju-Yi Lee; Cheng-Yang Liu

doi:10.1117/12.793710

11 August 2008 Optical heterodyne laser encoder for in-plane nanopositioning

Chyan-Chyi Wu, Cheng-Chih Hsu, Ju-Yi Lee, Cheng-Yang Liu

Author Affiliations +

Proceedings Volume 7063, Interferometry XIV: Techniques and Analysis; 70631A (2008) https://doi.org/10.1117/12.793710
Event: Optical Engineering + Applications, 2008, San Diego, California, United States

Abstract

Laser encoders as an optical displacement measurement technique have many applications such as modern manufacturing, scanning probe microscopy (SPM) and nanomanipulation. For the measurement scale down to the nanometer range, the stability, sensitivity and tolerance to dynamic runout are the key issues for laser encoders. This paper presents a novel laser encoder for sub-nanometer displacement measurement. It is based on optical heterodyne interferometry and conjugate optics with a symmetric and quasi-common-path optical configuration. It offers high stability, high resolution, low uncertainty displacement measurements and can break through the dynamic runout problem in laser encoders. Experimental results reveal that the laser encoder can detect a displacement variation of 26 pm, and can thus be applied to sub-nanometer or even picometer positioning.

Citation Download Citation

Chyan-Chyi Wu, Cheng-Chih Hsu, Ju-Yi Lee, and Cheng-Yang Liu "Optical heterodyne laser encoder for in-plane nanopositioning", Proc. SPIE 7063, Interferometry XIV: Techniques and Analysis, 70631A (11 August 2008); https://doi.org/10.1117/12.793710

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