Integrated quantum efficiency, reflectance, topography and stress metrology for solar cell manufacturing

Wojtek J. Walecki; Fanny Szondy

doi:10.1117/12.797541

11 August 2008 Integrated quantum efficiency, reflectance, topography and stress metrology for solar cell manufacturing

Wojtek J. Walecki, Fanny Szondy

Proceedings Volume 7064, Interferometry XIV: Applications; 70640A (2008) https://doi.org/10.1117/12.797541
Event: Optical Engineering + Applications, 2008, San Diego, California, United States

Abstract

We report application of phase shifting interferometric measurements to study of the spatially resolved quantum efficiency (QE) of the semiconductor solar-cells. In our method solar-cell is illuminated by two sets of mutually spatially orthogonal fringe patterns of known frequency, and varying phase (shifted phase). We report theoretical results obtained using simple analytical model describing properties of small spot size defects, and preliminary experimental results validating this method. The new method and new apparatus can be also used for studies of spectrally resolved QE.

Citation Download Citation

Wojtek J. Walecki and Fanny Szondy "Integrated quantum efficiency, reflectance, topography and stress metrology for solar cell manufacturing", Proc. SPIE 7064, Interferometry XIV: Applications, 70640A (11 August 2008); https://doi.org/10.1117/12.797541

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available