Transparent film profiling and analysis by interference microscopy

Peter J. de Groot; Xavier Colonna de Lega; Martin F. Fay

doi:10.1117/12.794936

11 August 2008 Transparent film profiling and analysis by interference microscopy

Peter J. de Groot, Xavier Colonna de Lega, Martin F. Fay

Proceedings Volume 7064, Interferometry XIV: Applications; 70640I (2008) https://doi.org/10.1117/12.794936
Event: Optical Engineering + Applications, 2008, San Diego, California, United States

Abstract

A white-light interferometer with new signal analysis techniques provides 3D top surface and thickness profiles of transparent films. With an additional change from conventional object imaging to pupil-plane imaging, the same instrument platform provides detailed properties of multilayer film stacks, including material optical properties. These capabilities complement conventional surface-topography measurements on the same platform, resulting in a highly flexible tool.

Citation Download Citation

Peter J. de Groot, Xavier Colonna de Lega, and Martin F. Fay "Transparent film profiling and analysis by interference microscopy", Proc. SPIE 7064, Interferometry XIV: Applications, 70640I (11 August 2008); https://doi.org/10.1117/12.794936

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