Translator Disclaimer
3 September 2008 X-ray prism lenses with large apertures
Author Affiliations +
Existing refractive X-ray lenses are characterized by either small apertures due to high absorption in the border areas. They can only be used with synchrotron sources, offering high brilliance. By increasing transparency and aperture the range of applications will expand, common X-ray tubes might turn out to be reasonable X-ray sources in an application with X-ray lenses. A basic concept that meets the demands is an X-ray Fresnel lens. But, Fresnel X-ray lenses are hard to fabricate, since the smaller lens structures need to be produced with extremely high aspect ratios. As an alternative, the Fresnel structures can be replaced by an array of prism-shaped structures. In particular equilateral triangular structures are easier to fabricate and additionally give a higher surface-volume-ratio, increasing transparency. At the Institute for Microstructure Technology the development of such prism lenses is under way. Due to the physical properties of X-rays, several thousands of precisely arranged prisms with large aspect ratio and smooth sidewalls are needed for a single X-ray lens. Therefore, direct X-ray lithography is used to fabricate the SU-8 microstructures. The length of one single prism edge is of the order of 10 μm. One single prismatic X-ray lens consists of up to 60.000 prisms. With the appropriate X-ray mask, refractive X-ray lenses with an aperture of up to 2 mm, for a source distance of 350 mm and a working distance of 350 mm are being produced, assuming a point-shaped source. These X-ray prism lenses are not optimized for smallest focal diameter, but designed to illuminate samples in X-ray optical systems. Most important in this application is an as high transparency as possible.
© (2008) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
M. Simon, E. Reznikova, V. Nazmov, A. Last, and W. Jark "X-ray prism lenses with large apertures", Proc. SPIE 7077, Advances in X-Ray/EUV Optics and Components III, 70771Q (3 September 2008);


Testing of x-ray prism lenses
Proceedings of SPIE (September 27 2008)
Beamline and exposure station for deep x ray lithography at...
Proceedings of SPIE (September 13 1996)
The study on the compound x ray refractive lens using...
Proceedings of SPIE (December 30 2004)
High-aspect-ratio structure formation in x-ray lithography
Proceedings of SPIE (October 20 2000)
X-ray lenses fabricated by deep x-ray lithography
Proceedings of SPIE (November 21 2002)
Planar sets of cross x ray refractive lenses from SU...
Proceedings of SPIE (November 04 2004)

Back to Top