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3 September 2008 Multilayers and crystal for a multi-bandpass monochromator
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Abstract
VESPERS beamline is a hard X-ray microprobe beamline dedicated to micro-diffraction and micro-fluorescence analysis at the Canadian Light Source; it requires multi-bandpass X-ray beams for different types of samples and experiments. A specially designed double crystal/multilayer monochromator was built for this purpose with three different bandpasses: 0.01%, 1.6% and 10%. The diffraction elements used for the monochromator have a triple-stripe design using Si(111) crystal as a single substrate with two differing stripes of Mo/B4C multilayers deposited thereon. The uncovered Si(111) section provides a 0.01% bandpass, while the periodic and depth-graded Mo/B4C multilayers provide 1.6% and 10% bandpasses, respectively. This paper outlines the requirements and specifications of the diffracting elements as well as the design, deposition and optimization of the multilayers. The performance of the deposited multilayer structures has been tested using Cu-Kα radiation line with a Huber diffractometer.
© (2008) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Renfei Feng, Yuriy Platonov, David Broadway, Gene Ice, Andrea Gerson, and Stewart McIntyre "Multilayers and crystal for a multi-bandpass monochromator", Proc. SPIE 7077, Advances in X-Ray/EUV Optics and Components III, 70771Y (3 September 2008); https://doi.org/10.1117/12.806344
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