A compact MicroCT/MicroXRF scanner for non-destructive 3D chemical analysis

Alexander Sasov; Xuan Liu; David Rushmer

doi:10.1117/12.793208

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15 September 2008 A compact MicroCT/MicroXRF scanner for non-destructive 3D chemical analysis

Alexander Sasov, Xuan Liu, David Rushmer

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Proceedings Volume 7078, Developments in X-Ray Tomography VI; 70780R (2008) https://doi.org/10.1117/12.793208
Event: Optical Engineering + Applications, 2008, San Diego, California, United States

Abstract

We have developed a compact laboratory scanner, which combines X-ray microtomography (microCT) with X-ray microfluorescence tomography (3D microXRF). This dual-modality scanner opens possibility for nondestructive threedimensional volumetric analysis of local chemical composition, enhanced by morphological information provided by the built-in microCT. Unlike known microXRF methods based on collimated beam and detector, our microXRF scanner includes a full-field acquisition system based on an energy-sensitive detector with 512x512 pixels operating in photon counting mode. It allows detection of two-dimensional photon energy distribution in the range of 3...20keV. Up to 8 sets of energy windows can be selected for independent and simultaneous collection of microXRF images. By object rotation the scanner acquires projections in transmission and fluorescence mode for subsequent 3D reconstruction. The system acquires data in such a way that the CT scans and XRF scans match each other in magnification and angular position. This makes image registration much easier and more accurate. MicroCT data is reconstructed with a FBP algorithm. All microXRF datasets are reconstructed by a maximum likelihood iterative algorithm, which uses corresponding CT images for absorption correction.

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Alexander Sasov, Xuan Liu, and David Rushmer "A compact MicroCT/MicroXRF scanner for non-destructive 3D chemical analysis", Proc. SPIE 7078, Developments in X-Ray Tomography VI, 70780R (15 September 2008); https://doi.org/10.1117/12.793208

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