New plasma processes for antireflective structures on plastics

U. Schulz; P. Munzert; R. Leitel; N. Bollwahn; I. Wendling; N. Kaiser; A. Tünnermann

doi:10.1117/12.796705

25 September 2008 New plasma processes for antireflective structures on plastics

U. Schulz, P. Munzert, R. Leitel, N. Bollwahn, I. Wendling, N. Kaiser, A. Tünnermann

Proceedings Volume 7101, Advances in Optical Thin Films III; 710107 (2008) https://doi.org/10.1117/12.796705
Event: Optical Systems Design, 2008, Glasgow, Scotland, United Kingdom

Abstract

A new technology based on plasma etching has been developed to produce antireflective surface structures. By choosing thin initial layers and variable plasma conditions, a broad range of nanostructures can be obtained on various polymers. A broadband antireflective effect can be achieved that is less sensitive to the incident angle of light compared to multilayer interference coatings. Thin layers of silica help in mechanical protection, especially if the structured surface is nearly enclosed by the protection layer. In addition, surfaces that show both antireflective properties and an antifogging effect have been prepared. Combinations of SiO₂ and fluorine-containing layers were found to be useful in obtaining super-hydrophobic behavior. This advanced plasma etching is not limited to a special plasma source and the suitability of different plasma sources is discussed.

Citation Download Citation

U. Schulz, P. Munzert, R. Leitel, N. Bollwahn, I. Wendling, N. Kaiser, and A. Tünnermann "New plasma processes for antireflective structures on plastics", Proc. SPIE 7101, Advances in Optical Thin Films III, 710107 (25 September 2008); https://doi.org/10.1117/12.796705

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available