State of the art in deterministic production of optical thin films

D. Ristau; H. Ehlers; S. Schlichting; M. Lappschies

doi:10.1117/12.797264

25 September 2008 State of the art in deterministic production of optical thin films

D. Ristau, H. Ehlers, S. Schlichting, M. Lappschies

Proceedings Volume 7101, Advances in Optical Thin Films III; 71010C (2008) https://doi.org/10.1117/12.797264
Event: Optical Systems Design, 2008, Glasgow, Scotland, United Kingdom

Abstract

The production of advanced optical coatings with complex spectral characteristics and high performance is directly dependent on the stability of the deposition process and on the accuracy of the monitoring system employed for controlling the thickness of the constituent single layers. The present contribution is concentrated on the current state in deposition control and manufacturing of coatings with improved precision. As major topics the simulation of deposition processes, modern monitoring concepts, and the handling of errors occurring during the deposition process will be discussed. For illustration of some recent developments, results on the deposition of rugate filters on the basis of an ion beam sputtering process will be presented.

Citation Download Citation

D. Ristau, H. Ehlers, S. Schlichting, and M. Lappschies "State of the art in deterministic production of optical thin films", Proc. SPIE 7101, Advances in Optical Thin Films III, 71010C (25 September 2008); https://doi.org/10.1117/12.797264

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