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25 September 2008 Finish assessment of complex surfaces by advanced light scattering techniques
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The tremendous development of optical technologies and new manufacturing methods places challenging demands on metrology. Tools are required which allow for a rapid and sensitive inspection of the quality and homogeneity of surface finish even on large and curved surfaces. Light scattering measurements are best suited to meet these requirements. Recently developed instruments for scatter measurements at various wavelengths are presented in this paper. Examples of application are presented for diamond-turned and polished surfaces as well as for supersmooth EUV mirrors. In addition to laboratory-based instruments, compact and table-top tools currently being developed are briefly presented.
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Sven Schröder and Angela Duparré "Finish assessment of complex surfaces by advanced light scattering techniques", Proc. SPIE 7102, Optical Fabrication, Testing, and Metrology III, 71020F (25 September 2008);

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