A gas micromechanical sensor based on surface plasmons resonance

J. Hastanin; Y. Renotte; K. Fleury-Frenette; J. M. Defise; S. Habraken

doi:10.1117/12.799834

2 October 2008 A gas micromechanical sensor based on surface plasmons resonance

J. Hastanin, Y. Renotte, K. Fleury-Frenette, J. M. Defise, S. Habraken

Proceedings Volume 7116, Optically Based Biological and Chemical Detection for Defence IV; 711609 (2008) https://doi.org/10.1117/12.799834
Event: SPIE Security + Defence, 2008, Cardiff, Wales, United Kingdom

Abstract

This paper describes a new concept related to the micromechanical sensors for detecting the presence and concentration of chemical substances and/or biological organisms. We believe that this concept allow for a low cost and ease of fabrication of a large bi-dimensional array of sensors with an enhanced signal-to-noise ratio. A bi-dimensional array of micro-cantilever coated with different types of sensing layer enables to identify a characteristic chemical composition of the gas in real-time mode. The selective molecular absorption by cantilever sensing layer will produce cantilever bending proportional to the concentration of molecules. To increase the gas sensor sensitivity, the SPR phenomenon is used for cantilever deflection monitoring.

Citation Download Citation

J. Hastanin, Y. Renotte, K. Fleury-Frenette, J. M. Defise, and S. Habraken "A gas micromechanical sensor based on surface plasmons resonance", Proc. SPIE 7116, Optically Based Biological and Chemical Detection for Defence IV, 711609 (2 October 2008); https://doi.org/10.1117/12.799834

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