Paper
5 June 2008 Model for calculation of ion charge-state distribution in ECR ion source plasma
Alexandr V. Philippov, Grigori D. Shirkov, Fabrizio Consoli, Santo Gammino, Giovanni Ciavola, Luigi Celona, Sebastiano Barbarino
Author Affiliations +
Proceedings Volume 7121, Eighth Seminar on Problems of Theoretical and Applied Electron and Ion Optics; 71210C (2008) https://doi.org/10.1117/12.804377
Event: Eighth Seminar on Problems of Theoretical and Applied Electron and Ion Optics, 2007, Moscow, Russian Federation
Abstract
The investigation of the widespread 0D fluid model Ref. 1 - Ref. 8 for calculation of ion charge-state distributions (CSD) in electron cyclotron resonance (ECR) ion source Ref. 1 is presented. The modification of this model that allows one to describe the confinement and accumulation processes of highly charged ions in ECR plasma for gas mixing case more precisely is discussed. The description of the calculation technique for the time confinement of ions and electrons based on the theory of Pastukhov is also given, videlicet - calculation of confinement times during two stage minimization scheme of special functionals. The results obtained by this approach have been compared with available experimental data.
© (2008) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Alexandr V. Philippov, Grigori D. Shirkov, Fabrizio Consoli, Santo Gammino, Giovanni Ciavola, Luigi Celona, and Sebastiano Barbarino "Model for calculation of ion charge-state distribution in ECR ion source plasma", Proc. SPIE 7121, Eighth Seminar on Problems of Theoretical and Applied Electron and Ion Optics, 71210C (5 June 2008); https://doi.org/10.1117/12.804377
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KEYWORDS
Ions

Plasma

Magnetism

Particles

Ionization

Data modeling

Microwave radiation

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