Characterization of binary and attenuated phase shift mask blanks for 32nm mask fabrication

Thomas Faure; Emily Gallagher; Michael Hibbs; Louis Kindt; Ken Racette; Richard Wistrom; Amy Zweber; Alfred Wagner; Yasutaka Kikuchi; Toru Komizo; Satoru Nemoto

doi:10.1117/12.801950

17 October 2008 Characterization of binary and attenuated phase shift mask blanks for 32nm mask fabrication

Thomas Faure, Emily Gallagher, Michael Hibbs, Louis Kindt, Ken Racette, Richard Wistrom, Amy Zweber, Alfred Wagner, Yasutaka Kikuchi, Toru Komizo, Satoru Nemoto

Author Affiliations +

Proceedings Volume 7122, Photomask Technology 2008; 712209 (2008) https://doi.org/10.1117/12.801950
Event: SPIE Photomask Technology, 2008, Monterey, California, United States

Abstract

During the development of optical lithography extensions for 32nm, both binary and attenuated phase shift Reticle Enhancement Technologies (RETs) were evaluated. The mask blank has a very strong influence on the minimum feature size and critical dimension (CD) performance that can be achieved on the finished reticle and can have a significant impact on the ultimate wafer lithographic performance. Development of a suitable high resolution binary mask making process was particularly challenging. Standard chrome on glass (COG) binary blanks with 70 nm thick chrome films were unable to support the required minimum feature size, linearity, and through pitch requirements. Two alternative mask blank configurations were evaluated for use in building high resolution binary masks: a binary (BIN) mask blank based on the standard attenuated PSM blank and an Opaque MoSi on Glass (OMOG) mask blank consisting of a newly- developed opaque MoSi [1]. Data comparing the total process bias, minimum feature size, CD uniformity, linearity, through pitch, etch loading effects, flatness, film stress, cleaning durability and radiation durability performance of the different binary and attenuated PSM mask blanks are reported. The results show that the new OMOG binary blank offers significant mask performance benefits relative to the other binary and attenuated PSM mask blanks. The new OMOG blank was the opaque mask blank candidate most capable of meeting 32nm binary mask fabrication requirements..

Citation Download Citation

Thomas Faure, Emily Gallagher, Michael Hibbs, Louis Kindt, Ken Racette, Richard Wistrom, Amy Zweber, Alfred Wagner, Yasutaka Kikuchi, Toru Komizo, and Satoru Nemoto "Characterization of binary and attenuated phase shift mask blanks for 32nm mask fabrication", Proc. SPIE 7122, Photomask Technology 2008, 712209 (17 October 2008); https://doi.org/10.1117/12.801950

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

;

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE