True reticle cost saving by multi level reticle approach

Thomas Struck; Hendrik Kirbach

doi:10.1117/12.800920

17 October 2008 True reticle cost saving by multi level reticle approach

Thomas Struck, Hendrik Kirbach

Author Affiliations +

Proceedings Volume 7122, Photomask Technology 2008; 712233 (2008) https://doi.org/10.1117/12.800920
Event: SPIE Photomask Technology, 2008, Monterey, California, United States

Abstract

Today reticle costs become one of the main contributors in the cost of manufacturing of advanced logic products. Especially for low volume projects as of product sampling as well as design and product verifications the saving of reticle costs becomes worthwhile. Multi level reticles are the combination of more then one lithographical layer on one physical reticle. Due to this approach the physical amount of reticles per tape out will be reduced and thereby also the costs for reticles will be significantly decreased. The multi level reticle approach is implemented as standard option in the INFINEON Technologies tape out flow for advanced logic products. This means dependent on forecasted volume and chip size it could be decided to tape out a project on multi level- or single level reticle. Technical setup, reticle layout, specification, CAD flow and experience in daily work using multi level reticles in different design nodes will be shown. Reticle cost advantage versus reduced throughput will be discussed.

Citation Download Citation

Thomas Struck and Hendrik Kirbach "True reticle cost saving by multi level reticle approach", Proc. SPIE 7122, Photomask Technology 2008, 712233 (17 October 2008); https://doi.org/10.1117/12.800920

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