Evaluation of a backside-illuminated ISIS

H. D. Nguyen; C. Vo-Le; V. T. S. Dao; K. Takehara; T. G. Etoh; Y. Kondo; H. Maruno; H. Tominaga; H. Soya; H. van Kuijk; J. Bosiers; W. Klaassens; G. Ingram; S. Singh; M. Lesser

doi:10.1117/12.821985

10 February 2009 Evaluation of a backside-illuminated ISIS

H. D. Nguyen, C. Vo-Le, V. T. S. Dao, K. Takehara, T. G. Etoh, Y. Kondo, H. Maruno, H. Tominaga, H. Soya, H. van Kuijk, J. Bosiers, W. Klaassens, G. Ingram, S. Singh, M. Lesser

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Proceedings Volume 7126, 28th International Congress on High-Speed Imaging and Photonics; 712607 (2009) https://doi.org/10.1117/12.821985
Event: 28th International Congress on High-Speed Imaging and Photonics, 2008, Canberra, Australia

Abstract

This paper presents preliminary evaluation results of a test sensor of the backside-illuminated ISIS, an ultra-high sensitivity and ultra-high speed CCD image sensor. To achieve ultra-high sensitivity, the CCD image sensor employs the following three technologies: backside illumination, cooling and Charge Carrier Multiplication (CCM). The test sensor has been designed, fabricated and evaluated. At room temperature without cooling, the video camera has about ten-time higher sensitivity than the previous one, which was supported by a conventional front side illumination technology. Furthermore, the video camera can detect images at very low signal level, less than 5 e-, by using CCM at -40 degree C.

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H. D. Nguyen, C. Vo-Le, V. T. S. Dao, K. Takehara, T. G. Etoh, Y. Kondo, H. Maruno, H. Tominaga, H. Soya, H. van Kuijk, J. Bosiers, W. Klaassens, G. Ingram, S. Singh, and M. Lesser "Evaluation of a backside-illuminated ISIS", Proc. SPIE 7126, 28th International Congress on High-Speed Imaging and Photonics, 712607 (10 February 2009); https://doi.org/10.1117/12.821985

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KEYWORDS

Sensors

Cameras

Quantum efficiency

Electrons

Image sensors

Interference (communication)

Signal to noise ratio

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