Characteristic analysis and simulation for polysilicon comb micro-accelerometer

Fengli Liu; Yongping Hao

doi:10.1117/12.806270

13 October 2008 Characteristic analysis and simulation for polysilicon comb micro-accelerometer

Fengli Liu, Yongping Hao

Proceedings Volume 7127, Seventh International Symposium on Instrumentation and Control Technology: Sensors and Instruments, Computer Simulation, and Artificial Intelligence; 71270K (2008) https://doi.org/10.1117/12.806270
Event: Seventh International Symposium on Instrumentation and Control Technology, 2008, Beijing, China

Abstract

Micro-accelerometer structure is one of common MEMS devices. Its performance and characteristic couldn't be detected in the package. Under the impact of static load shock, dynamic harmonic load shock and temperature variation, the response were investigated. When static load was applied on the top of the micro-accelerator, its displacement and contact force that applied on the bottom increased nonlinearly with the input load increased. While the dynamic harmonic load applied on micro-accelerator, the changes of the generalized acceleration, generalized displacement, generalized velocity, phase acceleration, phase displacement, phase velocity in six modes with different wave frequencies were gained in mode analyses. The impact of temperature on device performance was investigated and the ideal work environment temperature was obtained.

Citation Download Citation

Fengli Liu and Yongping Hao "Characteristic analysis and simulation for polysilicon comb micro-accelerometer", Proc. SPIE 7127, Seventh International Symposium on Instrumentation and Control Technology: Sensors and Instruments, Computer Simulation, and Artificial Intelligence, 71270K (13 October 2008); https://doi.org/10.1117/12.806270

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KEYWORDS

Phase velocity

Electromechanical design

Microelectromechanical systems

Temperature metrology

Capacitance

Protactinium

Electrodes

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