Microstructure silicon force sensor and its simulation

Ali El Mahdi Mohamed; Shangchun Fan; Zhanshe Guo

doi:10.1117/12.806327

13 October 2008 Microstructure silicon force sensor and its simulation

Ali El Mahdi Mohamed, Shangchun Fan, Zhanshe Guo

Proceedings Volume 7127, Seventh International Symposium on Instrumentation and Control Technology: Sensors and Instruments, Computer Simulation, and Artificial Intelligence; 712712 (2008) https://doi.org/10.1117/12.806327
Event: Seventh International Symposium on Instrumentation and Control Technology, 2008, Beijing, China

Abstract

This paper introduces an a practical silicon beam resonator attached to an E-type round diaphragm, which is used for measuring the concentrated force. Working principle of this sensor in introduced and relationship between the basic neutral frequency of the beam resonator and the concentrated force are analyzed and investigated. FEM (Finite Element Method) simulation is used to simulate the vibration features of the above beam resonant and the microsensor. Finally, based on the differential output mean, a set of optimum parameters of the above sensing unit is determined.

Citation Download Citation

Ali El Mahdi Mohamed, Shangchun Fan, and Zhanshe Guo "Microstructure silicon force sensor and its simulation", Proc. SPIE 7127, Seventh International Symposium on Instrumentation and Control Technology: Sensors and Instruments, Computer Simulation, and Artificial Intelligence, 712712 (13 October 2008); https://doi.org/10.1117/12.806327

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