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13 October 2008Research on angle actuator of spatial resonance MOEMS gyroscope
A novel actuator of small angle control is researched and designed in this paper, which can be used in micro optical
electro-mechanical system (MOEMS) gyroscope. This actuator is composed of three pieces of piezoelectric ceramics
(PZT), foundation base and gear frame. According to converse piezoelectric effect, dilations of the PZT change when
applied voltages are different which leads actuator to have a deflection angle. Connected with control circuit, actuator
has the ability to exactly adjust angle which has arc-second level. It can accomplish the adjustment of spatial resonator
with high efficiency. Structure model of the actuator was set up, and simulation was completed in this paper. Also the
performance of actuator was validated by experiment.
Zaiyou Pan,Huilan Liu, andLishuang Feng
"Research on angle actuator of spatial resonance MOEMS gyroscope", Proc. SPIE 7127, Seventh International Symposium on Instrumentation and Control Technology: Sensors and Instruments, Computer Simulation, and Artificial Intelligence, 712714 (13 October 2008); https://doi.org/10.1117/12.806335
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Zaiyou Pan, Huilan Liu, Lishuang Feng, "Research on angle actuator of spatial resonance MOEMS gyroscope," Proc. SPIE 7127, Seventh International Symposium on Instrumentation and Control Technology: Sensors and Instruments, Computer Simulation, and Artificial Intelligence, 712714 (13 October 2008); https://doi.org/10.1117/12.806335