Limits of precision measurements based on interferometers

G. Jäger

doi:10.1117/12.819537

31 December 2008 Limits of precision measurements based on interferometers

G. Jäger

Proceedings Volume 7130, Fourth International Symposium on Precision Mechanical Measurements; 713002 (2008) https://doi.org/10.1117/12.819537
Event: Fourth International Symposium on Precision Mechanical Measurements, 2008, Anhui, China

Abstract

Laser interferometric methods are employed in precision measurements and positioning tasks, since they provide the means for attaining high metric resolution and precision, even over large measurement ranges. The most important fundamental principles of heterodyne and homodyne interferometers are discussed. A metrological analysis makes it possible to describe the advantages and limits of laser interferometry. The design and functionality of fibre-coupled miniature interferometers are described. The broad applicability of interferometers to microtechnology, nanotechnology and precision mechatronics is explained.

Citation Download Citation

G. Jäger "Limits of precision measurements based on interferometers", Proc. SPIE 7130, Fourth International Symposium on Precision Mechanical Measurements, 713002 (31 December 2008); https://doi.org/10.1117/12.819537

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