Three intelligentization methods for time grating displacement sensor

Xiaokang Liu; Donglin Peng; Yetai Fei; Yudan Zeng

doi:10.1117/12.819591

31 December 2008 Three intelligentization methods for time grating displacement sensor

Xiaokang Liu, Donglin Peng, Yetai Fei, Yudan Zeng

Proceedings Volume 7130, Fourth International Symposium on Precision Mechanical Measurements; 71301H (2008) https://doi.org/10.1117/12.819591
Event: Fourth International Symposium on Precision Mechanical Measurements, 2008, Anhui, China

Abstract

To improve the precision of time grating displacement sensor and enhance its performance by software, three intelligentization methods are studied. A self-compensation method is proposed based on digital closed-loop control technology that eliminates the influences of these factors such as working condition, circuitry parameters and so on. A self-calibration method for time grating is presented that eliminates zero drift and gain drift without external high-precision reference signals. Then an error self-correction method is proposed. Experiment results conform that high stability is obtained by using self-compensation and self-calibration technology, and high precision is achieved by using self-correction technology.

Citation Download Citation

Xiaokang Liu, Donglin Peng, Yetai Fei, and Yudan Zeng "Three intelligentization methods for time grating displacement sensor", Proc. SPIE 7130, Fourth International Symposium on Precision Mechanical Measurements, 71301H (31 December 2008); https://doi.org/10.1117/12.819591

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