3D measurement system of micro-organization based on two-ray-path scanning

Xiaolei Shan; Dongxian Zhang; Chao Liu; Haijun Zhang

doi:10.1117/12.819668

31 December 2008 3D measurement system of micro-organization based on two-ray-path scanning

Xiaolei Shan, Dongxian Zhang, Chao Liu, Haijun Zhang

Proceedings Volume 7130, Fourth International Symposium on Precision Mechanical Measurements; 713031 (2008) https://doi.org/10.1117/12.819668
Event: Fourth International Symposium on Precision Mechanical Measurements, 2008, Anhui, China

Abstract

A 3D measurement system of micro organization based on two-ray-path scanning was developed. This article introduced the principle and setup of the system. Experiments were carried out to measure the three-dimensional shape of some micro organizations. The results showed that this system could measure accurately not only the thickness of each part of the micro organization, but also can show its three-dimensional shape quickly and accurately. The vertical error was less than 2 μm. This system has advantages of compact structure, accurate detection, and high reliability, and can realize nondestructive measurement of micro organization.

Citation Download Citation

Xiaolei Shan, Dongxian Zhang, Chao Liu, and Haijun Zhang "3D measurement system of micro-organization based on two-ray-path scanning", Proc. SPIE 7130, Fourth International Symposium on Precision Mechanical Measurements, 713031 (31 December 2008); https://doi.org/10.1117/12.819668

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available