Error analysis of 2-D diffraction grating interferometer for high-resolution displacement measurement

Haojie Xia; Yetai Fei; Mei Zhang

doi:10.1117/12.819742

31 December 2008 Error analysis of 2-D diffraction grating interferometer for high-resolution displacement measurement

Haojie Xia, Yetai Fei, Mei Zhang

Proceedings Volume 7130, Fourth International Symposium on Precision Mechanical Measurements; 713052 (2008) https://doi.org/10.1117/12.819742
Event: Fourth International Symposium on Precision Mechanical Measurements, 2008, Anhui, China

Abstract

2-D grating interferometer configuration for high resolution displacement measurements is introduced, and the interferometer uses one cross grating as the scale to achieve planar displacement measurement. According to 2-D grating interferometer structure, error sources are analyzed, and the pitch and yaw of 2-D grating guide caused by planar guide's non-linearity is the main factors to decrease the measurement system's accuracy. The theoretical analysis of the three spatial axes guide error is carried out and the related errors are evaluated separately. According to the analysis, the measurement accuracy is sensitive to 2-D grating movement's pitch and yaw, the grating's location deflections are only systematic error and can be compensated by calibration experiments and software, some methods of system error correction and system mount are given. In order to decrease the system sensitivity to the errors of the grating plane movement, the improved configuration is proposed.

Citation Download Citation

Haojie Xia, Yetai Fei, and Mei Zhang "Error analysis of 2-D diffraction grating interferometer for high-resolution displacement measurement", Proc. SPIE 7130, Fourth International Symposium on Precision Mechanical Measurements, 713052 (31 December 2008); https://doi.org/10.1117/12.819742

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available