Optimization of laser-damage resistance of evaporated hafnia films at 351nm

J. B. Oliver; S. Papernov; A. W. Schmid; J. C. Lambropoulos

doi:10.1117/12.805383

30 December 2008 Optimization of laser-damage resistance of evaporated hafnia films at 351nm

J. B. Oliver, S. Papernov, A. W. Schmid, J. C. Lambropoulos

Author Affiliations +

Proceedings Volume 7132, Laser-Induced Damage in Optical Materials: 2008; 71320J (2008) https://doi.org/10.1117/12.805383
Event: Boulder Damage Symposium XL Annual Symposium on Optical Materials for High Power Lasers, 2008, Boulder, Colorado, United States

Abstract

A systematic study was undertaken to improve the laser-damage resistance of multilayer high-reflector coatings for use at 351 nm on the OMEGA EP Laser System. A series of hafnium dioxide monolayer films deposited by electron-beam evaporation with varying deposition rates and oxygen backfill pressures were studied using transmission electron microscopy (TEM), x-ray diffraction (XRD), and refractive index modeling. These exhibit microstructural changes for sufficiently slow deposition rates and high oxygen backfill pressures, resulting in an absence of crystalline inclusions and a lower refractive index. Hafnia monolayers exhibited laser-damage resistance as high as 12 J/cm² at 351 nm with a 0.5-ns pulse. This process was utilized in the fabrication of reduced electric-field-type multilayer high-reflector coatings. Measured laser-damage thresholds as high as 16.63 J/cm² were achieved under identical test conditions, an exceptional improvement relative to historical damage thresholds of the order of 3 to 5 J/cm².

Citation Download Citation

J. B. Oliver, S. Papernov, A. W. Schmid, and J. C. Lambropoulos "Optimization of laser-damage resistance of evaporated hafnia films at 351nm", Proc. SPIE 7132, Laser-Induced Damage in Optical Materials: 2008, 71320J (30 December 2008); https://doi.org/10.1117/12.805383

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

;

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE