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The organic silicone oil applied over the surface of a fused silica glass or Kaliumdihydrogenphosphat (KDP) nonlinear
optical crystal was changed to an inorganic glass by the photochemical oxidization using a Xe2 excimer lamp in the air.
As a result, the thin film acquired a characteristic of high power laser tolerance equivalent to quartz. Dimethylsiloxane
silicone oil was spin-coated on the surfaces of a fused silica substrate and KDP to form a film of 100-nm thickness;
which were irradiated with the Xe2
excimer lamp light (wavelength 172 nm, power density 10 mW/cm2) for 60 minutes
in oxygen atmosphere. The films were further irradiated with the Nd: YAG laser of ω (1.06 μm) or 2ω (0.503 μm), and
the laser damage test (J/cm2/10 ns) was conducted. The laser damage threshold of the photo-oxidized 100 nm thick
film formed on the fused silica substrate was 72 J/cm2 in ω and 107 J/cm2 in 2ω. On the KDP substrate, the laser
damage threshold of the thin film was 32.4J/cm2 in ω and 32.6 J/cm2 in 2ω.
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Masataka Murahara, Yuji Sato, Takayuki Funatsu, Takahisa Jitsuno, Yoshiaki Okamoto, "Formation of a photo-oxidized protective thin film with waterproof and high-power laser tolerance properties," Proc. SPIE 7132, Laser-Induced Damage in Optical Materials: 2008, 71320K (30 December 2008); https://doi.org/10.1117/12.804435