Experimental study of nanometrological AFM based on 3-D F-P interferometers

Yu Huang; Ruogu Zhu

doi:10.1117/12.810963

12 January 2009 Experimental study of nanometrological AFM based on 3-D F-P interferometers

Yu Huang, Ruogu Zhu

Proceedings Volume 7133, Fifth International Symposium on Instrumentation Science and Technology; 71334F (2009) https://doi.org/10.1117/12.810963
Event: International Symposium on Instrumentation Science and Technology, 2008, Shenyang, China

Abstract

Nanometrological AFM with high-resolution interferometers can be used for a wide-ranged measurements and be traceable to the unit of length, but such problems as reduction of measuring uncertainty, correction of complex nonlinearity error and advancing of repeatability restrict the application of MAFM. This paper presents the design of metrological AFM based on double F-P interferometer in XYZ directions, which consists of one He-Ne laser, one '1 x 3' fiber splitter and four self-focused lens instead of three sets of He-Ne laser. This design can not only avoid the traceable error caused by different optical sources in three directions, but also improve the resolution of the measurement through the transfer of nano-dimension to a pair of fundamental frequency pulse interval, while external noise and disturbance caused by outside environment are dramatically eliminated using double F-P interferometers of the same cavity length and material. Nano-dimensional measurement and stability test have been successfully accomplished with double F-P system in X or Z direction with measurement sensitivity of &lgr;/2000nm , which meets the requirement of nanometrology.

Citation Download Citation

Yu Huang and Ruogu Zhu "Experimental study of nanometrological AFM based on 3-D F-P interferometers", Proc. SPIE 7133, Fifth International Symposium on Instrumentation Science and Technology, 71334F (12 January 2009); https://doi.org/10.1117/12.810963

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available