Acid-degradable hyperbranched polymer and its application in bottom anti-reflective coatings

Ramil-Marcelo L. Mercado; Hao Xu; Joyce A. Lowes; Jim D. Meador; Douglas J. Guerrero

doi:10.1117/12.804743

4 December 2008 Acid-degradable hyperbranched polymer and its application in bottom anti-reflective coatings

Ramil-Marcelo L. Mercado, Hao Xu, Joyce A. Lowes, Jim D. Meador, Douglas J. Guerrero

Proceedings Volume 7140, Lithography Asia 2008; 71402W (2008) https://doi.org/10.1117/12.804743
Event: SPIE Lithography Asia - Taiwan, 2008, Taipei, Taiwan

Abstract

A photosensitive developer-soluble bottom anti-reflective coating (DBARC) system is described for KrF and ArF lithographic applications. The system contains an acid-degradable branched polymer that is self-crosslinked into a polymeric film after spin coating and baking at high temperature, rendering a solvent-insoluble coating. The DBARC coating is tunable in terms having the appropriate light absorption (k value) and thickness for desirable reflection control. After the exposure of the resist, the DBARC layer decrosslinks into developer-soluble small molecules in the presence of photoacid generator (PAG). Thus the DBARC layer is removed simultaneously with the photoresist in the development process, instead of being etched away in a plasma-etching chamber in the case of traditional BARC layers. The etch budget is significantly improved so that a thin resist can be used for better resolution. Alternatively, the etch step can be omitted in the case of the formation of layers that may be damaged by exposure to plasma.

Citation Download Citation

Ramil-Marcelo L. Mercado, Hao Xu, Joyce A. Lowes, Jim D. Meador, and Douglas J. Guerrero "Acid-degradable hyperbranched polymer and its application in bottom anti-reflective coatings", Proc. SPIE 7140, Lithography Asia 2008, 71402W (4 December 2008); https://doi.org/10.1117/12.804743

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available