Structure measurement of phase grating on post-magnification digital micro-holography

Wenjing Zhou; Yingjie Yu; Anand Asundi

doi:10.1117/12.814508

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3 October 2008 Structure measurement of phase grating on post-magnification digital micro-holography

Wenjing Zhou, Yingjie Yu, Anand Asundi

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Proceedings Volume 7155, Ninth International Symposium on Laser Metrology; 71550A (2008) https://doi.org/10.1117/12.814508
Event: Ninth International Symposium on Laser Metrology, 2008, Singapore, Singapore

Abstract

It develops a digital micro-holographic optical system to record the magnified hologram (named post-magnification digital micro-holography in this paper), which can suppress the quadratic phase aberration introduced by micro-objective (MO) and the wave-front difference between the object wave and reference wave. In order to show its remarkable trait, post-magnification micro-holography is compared with the traditional digital micro-holography (DMH) (named pre-magnification DMH) from the view of digital processing and aberration eliminating. Their differences are also analyzed by the measurement results of a phase grating with period 30lines/mm and depth 0.3 μm. Fresnel approximation algorithm is used to reconstruct the phase-contrast one of this phase grating. The results show that the presented system is greatly helpful to restrain the quadratic phase error.

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Wenjing Zhou, Yingjie Yu, and Anand Asundi "Structure measurement of phase grating on post-magnification digital micro-holography", Proc. SPIE 7155, Ninth International Symposium on Laser Metrology, 71550A (3 October 2008); https://doi.org/10.1117/12.814508

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