Paper
3 October 2008 A multipoint diffraction strain sensor using micro-lens array: review on variable sensitivity
Author Affiliations +
Proceedings Volume 7155, Ninth International Symposium on Laser Metrology; 71551R (2008) https://doi.org/10.1117/12.814564
Event: Ninth International Symposium on Laser Metrology, 2008, Singapore, Singapore
Abstract
A multipoint diffraction strain sensor (MDSS) in moire interferometer was developed earlier as direct approach for measuring strain of a macro-sized object. Recently a MDSS based on a micro-moire interferometer was proposed for measuring strain for a micro-sized object in wholefield with unique features, one of which is variable sensitivity and measurement range. The technique is now extended to measure both tilt and non-uniform strain of a material.
© (2008) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
J. Wang and Anand K. Asundi "A multipoint diffraction strain sensor using micro-lens array: review on variable sensitivity", Proc. SPIE 7155, Ninth International Symposium on Laser Metrology, 71551R (3 October 2008); https://doi.org/10.1117/12.814564
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KEYWORDS
Interferometers

Sensors

Diffraction

Charge-coupled devices

Microlens array

Wavefront sensors

Wavefronts

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