An experimental study of the fabrication of polycarbonate optical waveguides

Jianguo Chen; Xiao-yang Zhang; Tong Zhang; Jing-song Zhu; Peng-qin Wu; Jing-lun Zhou; Jiang-feng Fan; Hao-feng Yan

doi:10.1117/12.804769

9 February 2009 An experimental study of the fabrication of polycarbonate optical waveguides

Jianguo Chen, Xiao-yang Zhang, Tong Zhang, Jing-song Zhu, Peng-qin Wu, Jing-lun Zhou, Jiang-feng Fan, Hao-feng Yan

Proceedings Volume 7158, 2008 International Conference on Optical Instruments and Technology: Microelectronic and Optoelectronic Devices and Integration; 71580Y (2009) https://doi.org/10.1117/12.804769
Event: International Conference of Optical Instrument and Technology, 2008, Beijing, China

Abstract

A novel polycarbonate (PC) was introduced to apply in the optical waveguide devices. PC has following distinct merits than common polycarbonate: good processability, high thermal stability up to 293 C°; and high optical transparency. Optical properties of absorption behavior and propagation loss were investigated in slab waveguides, and low propagation losses of 0.335 dB/cm (@1550nm) and 0.197 dB/cm @632.8nm) have been achieved by using prismcoupler. Additionally, straight optical waveguide and MMI coupler of ring resonator were fabricated using ultraviolet (UV) cured resin Norland optical adhesive 61 (NOA61) as under or upper cladding layer and polycarbonate as waveguide core-layer material through conventional methods such as spin coating, photolithography and reactive ion etching (RIE). The process was studied in detail and the experimental results were given.

Citation Download Citation

Jianguo Chen, Xiao-yang Zhang, Tong Zhang, Jing-song Zhu, Peng-qin Wu, Jing-lun Zhou, Jiang-feng Fan, and Hao-feng Yan "An experimental study of the fabrication of polycarbonate optical waveguides", Proc. SPIE 7158, 2008 International Conference on Optical Instruments and Technology: Microelectronic and Optoelectronic Devices and Integration, 71580Y (9 February 2009); https://doi.org/10.1117/12.804769

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