Study on clamped-clamped beam in-plane capacitive resonators

Yingxia Jin; Yaquan Tang; Xiaomei Yu

doi:10.1117/12.811950

2 February 2009 Study on clamped-clamped beam in-plane capacitive resonators

Yingxia Jin, Yaquan Tang, Xiaomei Yu

Proceedings Volume 7159, 2008 International Conference on Optical Instruments and Technology: MEMS/NEMS Technology and Applications; 71590P (2009) https://doi.org/10.1117/12.811950
Event: International Conference of Optical Instrument and Technology, 2008, Beijing, China

Abstract

A clamped-clamped beam (CC beam) in-plane capacitive resonator with 100nm gap has been analyzed and fabricated by silicon micromachining technique in this paper. The nonlinearity effects in this device and the resonant mode of the main structure are analyzed and the overall system dynamics of motion equation and general solution are given firstly. The simulation results of resonant mode indicate that the structure size of the beam has great influence on the resonant frequency of beam. Moreover, with the high aspect-ratio combined poly- and single-crystal silicon micromachining technology (HARPSS), 100nm gap in-plane capacitive resonator has been fabricated.

Citation Download Citation

Yingxia Jin, Yaquan Tang, and Xiaomei Yu "Study on clamped-clamped beam in-plane capacitive resonators", Proc. SPIE 7159, 2008 International Conference on Optical Instruments and Technology: MEMS/NEMS Technology and Applications, 71590P (2 February 2009); https://doi.org/10.1117/12.811950

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