Porous silicon waveguide with integrated grating coupler for DNA sensing

Xing Wei; Christopher Kang; Guoguang Rong; Scott T. Retterer; Sharon M. Weiss

doi:10.1117/12.809239

19 February 2009 Porous silicon waveguide with integrated grating coupler for DNA sensing

Xing Wei, Christopher Kang, Guoguang Rong, Scott T. Retterer, Sharon M. Weiss

Proceedings Volume 7167, Frontiers in Pathogen Detection: From Nanosensors to Systems; 71670C (2009) https://doi.org/10.1117/12.809239
Event: SPIE BiOS, 2009, San Jose, California, United States

Abstract

A porous silicon waveguide with integrated grating coupler is demonstrated as a new platform for portable detection of chemical and biological molecules. The two-layer porous silicon waveguide is formed by electrochemical etching and a photoresist grating is fabricated directly on the waveguide core by means of electron beam lithography. Angle-resolved reflectance measurements reveal distinct peaks corresponding to the guided mode. A 0.420° reflectance shift was observed upon 16-base DNA hybridization, which was more than a factor of 5 larger than the observed reflectance shift after exposure to a mismatched DNA sequence.

Citation Download Citation

Xing Wei, Christopher Kang, Guoguang Rong, Scott T. Retterer, and Sharon M. Weiss "Porous silicon waveguide with integrated grating coupler for DNA sensing", Proc. SPIE 7167, Frontiers in Pathogen Detection: From Nanosensors to Systems, 71670C (19 February 2009); https://doi.org/10.1117/12.809239

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