Porous silicon waveguide with integrated grating coupler for DNA sensing

Xing Wei; Christopher Kang; Guoguang Rong; Scott T. Retterer; Sharon M. Weiss

doi:10.1117/12.809239

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19 February 2009 Porous silicon waveguide with integrated grating coupler for DNA sensing

Xing Wei, Christopher Kang, Guoguang Rong, Scott T. Retterer, Sharon M. Weiss

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Proceedings Volume 7167, Frontiers in Pathogen Detection: From Nanosensors to Systems; 71670C (2009) https://doi.org/10.1117/12.809239
Event: SPIE BiOS, 2009, San Jose, California, United States

Abstract

A porous silicon waveguide with integrated grating coupler is demonstrated as a new platform for portable detection of chemical and biological molecules. The two-layer porous silicon waveguide is formed by electrochemical etching and a photoresist grating is fabricated directly on the waveguide core by means of electron beam lithography. Angle-resolved reflectance measurements reveal distinct peaks corresponding to the guided mode. A 0.420° reflectance shift was observed upon 16-base DNA hybridization, which was more than a factor of 5 larger than the observed reflectance shift after exposure to a mismatched DNA sequence.

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Xing Wei, Christopher Kang, Guoguang Rong, Scott T. Retterer, and Sharon M. Weiss "Porous silicon waveguide with integrated grating coupler for DNA sensing", Proc. SPIE 7167, Frontiers in Pathogen Detection: From Nanosensors to Systems, 71670C (19 February 2009); https://doi.org/10.1117/12.809239

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