A confocal micro-imaging system incorporating a thermally actuated two axis MEMS scanner

Simon P. Poland; Lijie Li; Deepak Uttamchandani; John M. Girkin

doi:10.1117/12.807745

20 February 2009 A confocal micro-imaging system incorporating a thermally actuated two axis MEMS scanner

Simon P. Poland, Lijie Li, Deepak Uttamchandani, John M. Girkin

Proceedings Volume 7172, Endoscopic Microscopy IV; 717203 (2009) https://doi.org/10.1117/12.807745
Event: SPIE BiOS, 2009, San Jose, California, United States

Abstract

For in-vivo imaging applications the use of conventional confocal microscope systems are simply not practical due to their relatively large size and weight. There is, however, great interest from both the life science research community and the clinical profession for the development of compact and portable micro-optical instrumentation capable of achieving minimally invasive, in-vivo imaging of tissue with sub-cellular resolution. In this paper we describe a novel confocal micro-imaging system incorporating, at its core, a thermally driven, non-resonant two-axis MEMS scanner which serves as a substitute for the two single-axis galvanometer scanners commonly used in standard confocal imaging systems. In this paper we describe the non-linearity of such devices and a number of techniques to compensate for this.

Citation Download Citation

Simon P. Poland, Lijie Li, Deepak Uttamchandani, and John M. Girkin "A confocal micro-imaging system incorporating a thermally actuated two axis MEMS scanner", Proc. SPIE 7172, Endoscopic Microscopy IV, 717203 (20 February 2009); https://doi.org/10.1117/12.807745

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