Programmable picosecond pulse packets for micromachining with multiwatt UV fiber lasers

Theodore Alekel; David H. Foster; Jordan Crist

doi:10.1117/12.809754

24 February 2009 Programmable picosecond pulse packets for micromachining with multiwatt UV fiber lasers

Theodore Alekel, David H. Foster, Jordan Crist

Proceedings Volume 7201, Laser Applications in Microelectronic and Optoelectronic Manufacturing VII; 72010G (2009) https://doi.org/10.1117/12.809754
Event: SPIE LASE: Lasers and Applications in Science and Engineering, 2009, San Jose, California, United States

Abstract

Nanosecond class lasers have been the mainstay of optical machining for decades, delivering pulses with high fluences (>1 J/cm²) that cause many material sets to undergo thermally-induced phase changes to cause removal of matter. While in many cases their delivery of sheer laser power has proved useful, nanosecond lasers have fallen short of addressing current micromachining requirements with respect to decreased feature sizes and more complex substrates. One main issue is the laser pulse width endures throughout the ablation process, depositing energy is deposited into plasma formation and local material heating. Plasma shielding takes place when the laser pulse energy contributes to plasma formation to a greater extent than direct material ablation processes. The result is a crude "plasma cutter" of the substrate, leaving a telltale trail of localized dross and droplet deposition. Nanosecond lasers of sufficient process speeds are typically Q-switched with repetition rates less than 200 kHz. As a result, the scribed lines are made of a sequence of "blast events" that result in a variety of undesired consequences and a limited process speed.

Citation Download Citation

Theodore Alekel, David H. Foster, and Jordan Crist "Programmable picosecond pulse packets for micromachining with multiwatt UV fiber lasers", Proc. SPIE 7201, Laser Applications in Microelectronic and Optoelectronic Manufacturing VII, 72010G (24 February 2009); https://doi.org/10.1117/12.809754

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available