Uncooled infrared and terahertz detectors based on micromechanical mirror as a radiation pressure sensor

Gennady P. Berman; Boris M. Chernobrod; Alan R. Bishop; Vyacheslav N. Gorshkov

doi:10.1117/12.812541

18 February 2009 Uncooled infrared and terahertz detectors based on micromechanical mirror as a radiation pressure sensor

Gennady P. Berman, Boris M. Chernobrod, Alan R. Bishop, Vyacheslav N. Gorshkov

Author Affiliations +

Proceedings Volume 7204, Micromachining and Microfabrication Process Technology XIV; 720403 (2009) https://doi.org/10.1117/12.812541
Event: SPIE MOEMS-MEMS: Micro- and Nanofabrication, 2009, San Jose, California, United States

Abstract

We consider midinfrared (5 - 25 μm) and terahertz (100 - 1000 μm), room-temperature detectors based on a microcantilever/micromirror sensor of the radiation pressure. The significant enhancement of sensitivity is due the combination of non-absorption detection and a high quality optical microcavity. Applications for spectrometry and imaging are analyzed. It is shown that the radiation pressure sensor potentially has sensitivity at the level of or better than the best conventional uncooled detectors.

Citation Download Citation

Gennady P. Berman, Boris M. Chernobrod, Alan R. Bishop, and Vyacheslav N. Gorshkov "Uncooled infrared and terahertz detectors based on micromechanical mirror as a radiation pressure sensor", Proc. SPIE 7204, Micromachining and Microfabrication Process Technology XIV, 720403 (18 February 2009); https://doi.org/10.1117/12.812541

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