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24 February 2009 Diffraction gratings for compact integrated optical structures
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Abstract
Diffraction gratings used in various applications for compact optical devices. We used different technologies for this task: deep-UV lithography, FIB milling, e-beam lithography, and hot embossing/nanoimprinting technology. We analyzed advantages and disadvantages of each fabrication technology.
© (2009) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Ildar Salakhutdinov and Gregory W. Auner "Diffraction gratings for compact integrated optical structures", Proc. SPIE 7205, Advanced Fabrication Technologies for Micro/Nano Optics and Photonics II, 72050O (24 February 2009); https://doi.org/10.1117/12.809029
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