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23 February 2009 Active integrated components for fluid control in automatic analytical chip-based systems
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A robust optical sensor for liquid control in fluidic channels is reported. The sensor operates on light intensity modulation resulting from alteration of total internal reflection into partial reflection. When a liquid guided in a channel covers an integrated prism, the total internal reflection is changed into a partial reflection, resulting in an intensity modulation of the reflected light. The set-up comprises a fibre which is built in a coupler unit with integrated LED and photodiode as well as a prism micro-machined directly into a micro-fluidic polymeric channel by laser ablation. The Prism is of 45-90-45° type with a dimension of 0.5 mm × 1 mm × 2 mm. In this design the radiation of the LED light source is transmitted and collected from the prism by a 50:50 fibre coupler by means of total or partial internal reflection. The sensor was characterised by filling alternately the channel with water and air. The influence of stray light onto the sensor signal was tested by applying a strong uncollimated illumination of the channel. Only a small increase in the output signal level in the presence of air but a strong increase in case of the presence of water could be detected.
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F. von Germar, J. Claußen, R. Gransee, E. Schaeffer, L. B. Mohammadi, and T. Klotzbücher "Active integrated components for fluid control in automatic analytical chip-based systems", Proc. SPIE 7207, Microfluidics, BioMEMS, and Medical Microsystems VII, 720709 (23 February 2009);

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