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23 February 2009 Sensitivity evaluation of a Love wave sensor with multilayer structure for biochemical application
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Abstract
This paper presents a sensitivity evaluation of a love wave sensor with multilayer structure consisting of polymethyl methacrylate (PMMA)/SiO2/41o YX LiNbO3. A theoretical model is presented to describe wave propagation in love wave devices with multilayered structure on large piezoelectric substrate. A complex dispersion equation expanded into Taylor series was presented to describe the lossy mechanism of the PMMA layer. Using the gold film as the sensitive interface, the mass loading sensitivity of the love wave sensor for biochemical application was evaluated theoretically, and the effects from the SiO2 and PMMA on the sensor sensitivity were investigated to allow the design of an optimized structure. From the calculated results, the optimal thicknesses of SiO2 and PMMA in the multilayered structure were determined, and the sensitivity comparison between love waves in LiNbO3/SiO2/PMMA and LiNbO3/PMMA was studied, which shows that there is larger mass loading sensitivity in love wave devices with multilayered structure.
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Haekwan Oh, Wen Wang, Keekeun Lee, and Sangsik Yang "Sensitivity evaluation of a Love wave sensor with multilayer structure for biochemical application", Proc. SPIE 7207, Microfluidics, BioMEMS, and Medical Microsystems VII, 72070R (23 February 2009); https://doi.org/10.1117/12.809982
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