Integrated position sensing for 2D microscanning mirrors using the SOI device layer as the piezoresistive mechanical-elastic transformer

Jan Grahmann; Holger Conrad; Thilo Sandner; Thomas Klose; Harald Schenk

doi:10.1117/12.808151

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18 February 2009 Integrated position sensing for 2D microscanning mirrors using the SOI device layer as the piezoresistive mechanical-elastic transformer

Jan Grahmann, Holger Conrad, Thilo Sandner, Thomas Klose, Harald Schenk

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Proceedings Volume 7208, MOEMS and Miniaturized Systems VIII; 720808 (2009) https://doi.org/10.1117/12.808151
Event: SPIE MOEMS-MEMS: Micro- and Nanofabrication, 2009, San Jose, California, United States

Abstract

Position feedback of resonant scanning micromirrors plays a key role for various applications like portable laser projection displays or scanning grating spectrometers. The SOI device layer without an additional surface implantation is used for the piezoresistive sensor design. It assures the full compatibility to microscanner technology and requires no additional technological efforts. The necessary asymmetry of the current field density is achieved by the geometrical design of the sensor and its contacting. Integrated 2D position sensors with amplitude sensitivities of 0.42mV/V° were fabricated. FEA simulation and measured data correlates well with variations of ≤ 20.4%.

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Jan Grahmann, Holger Conrad, Thilo Sandner, Thomas Klose, and Harald Schenk "Integrated position sensing for 2D microscanning mirrors using the SOI device layer as the piezoresistive mechanical-elastic transformer", Proc. SPIE 7208, MOEMS and Miniaturized Systems VIII, 720808 (18 February 2009); https://doi.org/10.1117/12.808151

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