Silicon oxynitride-based integrated optical switch

G. Rehder; M. Stochero; M. I. Alayo

doi:10.1117/12.809650

23 February 2009 Silicon oxynitride-based integrated optical switch

G. Rehder, M. Stochero, M. I. Alayo

Proceedings Volume 7208, MOEMS and Miniaturized Systems VIII; 72080F (2009) https://doi.org/10.1117/12.809650
Event: SPIE MOEMS-MEMS: Micro- and Nanofabrication, 2009, San Jose, California, United States

Abstract

In this work we describe the fabrication and characterization of MOEMS-based integrated optical switches with improved ON/OFF performance. These structures consist of silicon oxynitride-based optical waveguides, through which a light beam of 633-nm can be conducted, and mobile thermo-electro actuated cantilevers, which form part of the waveguide and can work as ON-OFF switches for the laser. These switches allow the laser light to pass or block the laser light when activated electrically. The cantilevers are fabricated by freeing regions of the waveguide, which is done by front side micromachining the silicon wafer used as substrate. Also, they are actuated electrically through the heating of a metallic resistance positioned in the device, where the applied current heats the cantilevers and, due to the difference in thermal expansion coefficients of the constituent materials, it is possible to produce a controlled motion proportional to the heating current. Therefore, the switches can be electrically polarized in on/off cycles allowing or blocking the light through the waveguide, similar to logic "1's" and "0's".

Citation Download Citation

G. Rehder, M. Stochero, and M. I. Alayo "Silicon oxynitride-based integrated optical switch", Proc. SPIE 7208, MOEMS and Miniaturized Systems VIII, 72080F (23 February 2009); https://doi.org/10.1117/12.809650

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