Scaling of the Iris AO segmented MEMS DM to larger arrays

Michael A. Helmbrecht; Min He; Carl J. Kempf

doi:10.1117/12.813824

23 February 2009 Scaling of the Iris AO segmented MEMS DM to larger arrays

Michael A. Helmbrecht, Min He, Carl J. Kempf

Proceedings Volume 7209, MEMS Adaptive Optics III; 72090L (2009) https://doi.org/10.1117/12.813824
Event: SPIE MOEMS-MEMS: Micro- and Nanofabrication, 2009, San Jose, California, United States

Abstract

This paper presents preliminary development results of a high-stroke (>8 μm), 489 actuator, 163-piston/tip/tilt-segment deformable mirror (DM) and progress on a proof-of-concept 925-piston/tip/tilt-segment DM. It also presents a compact 512-channel driver box used to drive the 489 actuators of the 163-PTT-segment design.

Citation Download Citation

Michael A. Helmbrecht, Min He, and Carl J. Kempf "Scaling of the Iris AO segmented MEMS DM to larger arrays", Proc. SPIE 7209, MEMS Adaptive Optics III, 72090L (23 February 2009); https://doi.org/10.1117/12.813824

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