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23 February 2009 Initial performance results for high-aspect ratio gold MEMS deformable mirrors
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Abstract
The fabrication and initial performance results of high-aspect ratio 3-dimensional Micro-Electro-Mechanical System (MEMS) Deformable Mirrors (DM) for Adaptive Optics (AO) will be discussed. The DM systems were fabricated out of gold, and consist of actuators bonded to a continuous face sheet, with different boundary conditions. DM mirror displacements vs. voltage have been measured with a white light interferometer and the corresponding results compared to Finite Element Analysis (FEA) simulations. Interferometer scans of a DM have shown that ~9.4um of stroke can be achieved with low voltage, thus showing that this fabrication process holds promise in the manufacturing of future MEMS DM's for the next generation of extremely large telescopes.
© (2009) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Bautista Fernández and Joel Kubby "Initial performance results for high-aspect ratio gold MEMS deformable mirrors", Proc. SPIE 7209, MEMS Adaptive Optics III, 72090O (23 February 2009); https://doi.org/10.1117/12.809617
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