Initial performance results for high-aspect ratio gold MEMS deformable mirrors

Bautista Fernández; Joel Kubby

doi:10.1117/12.809617

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23 February 2009 Initial performance results for high-aspect ratio gold MEMS deformable mirrors

Bautista Fernández, Joel Kubby

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Proceedings Volume 7209, MEMS Adaptive Optics III; 72090O (2009) https://doi.org/10.1117/12.809617
Event: SPIE MOEMS-MEMS: Micro- and Nanofabrication, 2009, San Jose, California, United States

Abstract

The fabrication and initial performance results of high-aspect ratio 3-dimensional Micro-Electro-Mechanical System (MEMS) Deformable Mirrors (DM) for Adaptive Optics (AO) will be discussed. The DM systems were fabricated out of gold, and consist of actuators bonded to a continuous face sheet, with different boundary conditions. DM mirror displacements vs. voltage have been measured with a white light interferometer and the corresponding results compared to Finite Element Analysis (FEA) simulations. Interferometer scans of a DM have shown that ~9.4um of stroke can be achieved with low voltage, thus showing that this fabrication process holds promise in the manufacturing of future MEMS DM's for the next generation of extremely large telescopes.

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Bautista Fernández and Joel Kubby "Initial performance results for high-aspect ratio gold MEMS deformable mirrors", Proc. SPIE 7209, MEMS Adaptive Optics III, 72090O (23 February 2009); https://doi.org/10.1117/12.809617

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