Chalcogenide films for infrared integrated optics

Caroline Vigreux; Annie Pradel

doi:10.1117/12.807594

9 February 2009 Chalcogenide films for infrared integrated optics

Caroline Vigreux, Annie Pradel

Proceedings Volume 7218, Integrated Optics: Devices, Materials, and Technologies XIII; 721802 (2009) https://doi.org/10.1117/12.807594
Event: SPIE OPTO: Integrated Optoelectronic Devices, 2009, San Jose, California, United States

Abstract

The development of integrated optics components being able to work in the mid-infrared is of major interest for specific applications, such as the detection of pollutant gases for the environmental control or the detection of exoplanetary systems. Chalcogenide glasses being characterised by a unique property of transmission in the infrared are very promising materials for the realisation of such infrared micro-components. In order to realise and test channel waveguiding structures, we studied the deposition and the etching of chalcogenide films. Both ARROW and RIB waveguides were realised. In particular, all-chalcogenide RIB waveguides obtained by etching a Te-As-Se film deposited on an As-S bulk glass substrate were characterised at 10.6 μm.

Citation Download Citation

Caroline Vigreux and Annie Pradel "Chalcogenide films for infrared integrated optics", Proc. SPIE 7218, Integrated Optics: Devices, Materials, and Technologies XIII, 721802 (9 February 2009); https://doi.org/10.1117/12.807594

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