Near-field nano-imaging by nanophotodetector array

Boyang Liu; Ki Young Kim; Yingyan Huang; Seng-Tiong Ho

doi:10.1117/12.808635

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9 February 2009 Near-field nano-imaging by nanophotodetector array

Boyang Liu, Ki Young Kim, Yingyan Huang, Seng-Tiong Ho

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Proceedings Volume 7218, Integrated Optics: Devices, Materials, and Technologies XIII; 72180Q (2009) https://doi.org/10.1117/12.808635
Event: SPIE OPTO: Integrated Optoelectronic Devices, 2009, San Jose, California, United States

Abstract

The possibility of imaging objects at the resolution of smaller than the optical diffraction limit is of great interest to nanotechnologies and biotechnologies. In this paper, we present a novel near-filed nano-imaging device based on nanophotodetector(NPD) array, which is capable of addressing function. Multi-level Multi-electron(MLME) Finitedifference time-domain(FDTD) method is used to simulate the performance of NPD array. The simulation shows a highest obtainable resolution of 150nm for the light with 1.55μm wavelength. Various photolithography, e-beam lithography and etching back techniques have been developed to realize the NPD device. Up to 4x4 slab version NPD array with various resolutions have been successfully realized. The smallest pixel size is as small as 150nm.

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Boyang Liu, Ki Young Kim, Yingyan Huang, and Seng-Tiong Ho "Near-field nano-imaging by nanophotodetector array", Proc. SPIE 7218, Integrated Optics: Devices, Materials, and Technologies XIII, 72180Q (9 February 2009); https://doi.org/10.1117/12.808635

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