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10 February 2009Chirped waveguide gratings for low-cost silicon photonic wire packaging and other applications
We review our recent work on chirped waveguide gratings for efficient coupling between standard single mode optical
fibers and silicon photonic wire waveguides. The use of a linear chirp in grating period reduces the second order Bragg
reflection from the waveguide gratings and increases the coupling efficiency for perfectly vertical optical fibers.
Measurement results obtained from devices fabricated using deep UV lithography yielded coupling efficiencies of over
34%. Techniques to further improve the coupling efficiency will be discussed. The use of chirped waveguide gratings
for low cost photonic packaging and the application of waveguide gratings for splitting/combining light will also be
presented.
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C. Li, X. Chen, Z. Sheng, H. K. Tsang, "Chirped waveguide gratings for low-cost silicon photonic wire packaging and other applications," Proc. SPIE 7219, Optoelectronic Integrated Circuits XI, 721903 (10 February 2009); https://doi.org/10.1117/12.810005