Micro-nano photonic biosensors scalable at the wafer level

M. Holgado; R. Casquel; María-Fe Lagunas

doi:10.1117/12.806842

17 February 2009 Micro-nano photonic biosensors scalable at the wafer level

M. Holgado, R. Casquel, María-Fe Lagunas

Proceedings Volume 7220, Silicon Photonics IV; 72200P (2009) https://doi.org/10.1117/12.806842
Event: SPIE OPTO: Integrated Optoelectronic Devices, 2009, San Jose, California, United States

Abstract

We present a potential high sensitive label-free optical bio-sensing system based on biophotonic sensing cells, which can be fabricated and interrogated at wafer or disposable chip level. The key benefits rely on the holistic approach that combines bio-photonic resonant micro-nano cavities and advanced sub-micron spot size optical interrogation technologies. The proposed optical sensing system will be tremendously sensitive to refractive index variations by means of the observation of the reflectivity profile of three complementary enhanced sub-micron spot size optical technologies simultaneously (Reflectometry, Spectrometry and Ellipsometry based techniques), and the magnification due to the biophotonics resonant sensing cells, making possible to determine with more reliability and sensitivity the biomolecular interaction with the receptor biomolecules. This novel sensing system also offers an inexpensive solution for integration and packaging because it overcomes the need for using complex systems for light coupling such as inverted tapers or grating couplers, usually used in planar micro-nano photonic devices, because the sensor evaluation is done measuring vertically collecting the reflected light of the bio-photonic resonant sensing cells. The sensing system may use a tightly focused beam which allows measuring in situ micron/sub-micron size geometries, making the routine screening more cost-effective and suitable to perform hundreds of measurements on a single or several samples for multi-single or multiparameter measurements. The simultaneous used of the three different optical techniques will allow the systems to achieve a high throughput and productivity in comparison with other established analytical techniques. The levels of sensitivity expected are in the order of 10^-6/10^-7 refractive index units (RIU).

Citation Download Citation

M. Holgado, R. Casquel, and María-Fe Lagunas "Micro-nano photonic biosensors scalable at the wafer level", Proc. SPIE 7220, Silicon Photonics IV, 72200P (17 February 2009); https://doi.org/10.1117/12.806842

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